Author : Stephen M. Rossnagel
Publisher : William Andrew
ISBN 13 : 9780815512202
Total Pages : 523 pages
Book Rating : 4.01/5 ( download)
Book Synopsis Handbook of Plasma Processing Technology by : Stephen M. Rossnagel
Download or read book Handbook of Plasma Processing Technology written by Stephen M. Rossnagel and published by William Andrew. This book was released on 1990 with total page 523 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.