Author : Maurice H. Francombe
Publisher : Elsevier
ISBN 13 : 9780125330183
Total Pages : 352 pages
Book Rating : 4.89/5 ( download)
Book Synopsis Plasma Sources for Thin Film Deposition and Etching by : Maurice H. Francombe
Download or read book Plasma Sources for Thin Film Deposition and Etching written by Maurice H. Francombe and published by Elsevier. This book was released on 1994-08-18 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Steinbrüchel, Christoph; The formation of particles in thin-film processing plasmas.