Semiconductor Strain Metrology

Author : Terence K. S. Wong
Publisher : Bentham Science Publishers
ISBN 13 : 1608053598
Total Pages : 141 pages
Book Rating : 4.99/5 ( download)

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Download or read book Semiconductor Strain Metrology written by Terence K. S. Wong and published by Bentham Science Publishers. This book was released on 2012 with total page 141 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterizati

Author : D. Keith Bowen
Publisher : CRC Press
ISBN 13 : 1420005650
Total Pages : 296 pages
Book Rating : 4.53/5 ( download)

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Download or read book X-Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Author : Richard L. Hannah
Publisher :
ISBN 13 : 9780912053363
Total Pages : 476 pages
Book Rating : 4.64/5 ( download)

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Download or read book Strain Gage Users' Handbook written by Richard L. Hannah and published by . This book was released on 1992-01-01 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Author : R.L. Hannah
Publisher : Springer Science & Business Media
ISBN 13 : 9780412537202
Total Pages : 508 pages
Book Rating : 4.06/5 ( download)

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Download or read book Strain Gage Users' Handbook written by R.L. Hannah and published by Springer Science & Business Media. This book was released on 1992-06-30 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: This highly detailed handbook is a resource for those entering the field of stress analysis and instrumentation. The authors were brought together to provide their expert experience and have presented many practical solutions.

Author : Alain C. Diebold
Publisher : CRC Press
ISBN 13 : 0203904540
Total Pages : 703 pages
Book Rating : 4.41/5 ( download)

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Download or read book Handbook of Silicon Semiconductor Metrology written by Alain C. Diebold and published by CRC Press. This book was released on 2001-06-29 with total page 703 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

Author : National Institute of Standards and Technology (U.S.)
Publisher :
ISBN 13 :
Total Pages : 252 pages
Book Rating : 4.60/5 ( download)

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Download or read book National Semiconductor Metrology Program written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1990 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Author : Zhiyong Ma
Publisher : CRC Press
ISBN 13 : 1351733958
Total Pages : 1454 pages
Book Rating : 4.53/5 ( download)

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Download or read book Metrology and Diagnostic Techniques for Nanoelectronics written by Zhiyong Ma and published by CRC Press. This book was released on 2017-03-27 with total page 1454 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.

Author : S.K. Bhattacharya & S. Bhattacharya
Publisher : Vikas Publishing House
ISBN 13 : 9325984598
Total Pages : pages
Book Rating : 4.92/5 ( download)

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Download or read book Electrical Measurement and Control (WBSCTE) written by S.K. Bhattacharya & S. Bhattacharya and published by Vikas Publishing House. This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This book has been written with total focus on meeting the objectives of the subject 'Electrical Measurement and Control' as given by the syllabus of WBSCTE. The text has been written so as to create interest in the minds of students in learning further. After reading this book the student will be able to: • Identify the sub-systems of a complete instrumentation system and explain the function of each • Select the correct transducer for receiving the measurement system input • Explain the basic signal conditioning processes, data transmission techniques, data storage and display devices • Understand the working of control devices used in motor controls and process controls • Represent a control system in a simplified block diagram form using transfer function • Determine the stability conditions of a system using stability study criteria and explain the use of different types of controllers

Author : ARUN K. GHOSH
Publisher : PHI Learning Pvt. Ltd.
ISBN 13 : 8120346254
Total Pages : 937 pages
Book Rating : 4.53/5 ( download)

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Download or read book INTRODUCTION TO MEASUREMENTS AND INSTRUMENTATION written by ARUN K. GHOSH and published by PHI Learning Pvt. Ltd.. This book was released on 2012-10-16 with total page 937 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fourth edition of this highly readable and well-received book presents the subject of measurement and instrumentation systems as an integrated and coherent text suitable for a one-semester course for undergraduate students of Instrumentation Engineering, as well as for instrumentation course/paper for Electrical/Electronics disciplines. Modern scientific world requires an increasing number of complex measurements and instruments. The subject matter of this well-planned text is designed to ensure that the students gain a thorough understanding of the concepts and principles of measurement of physical quantities and the related transducers and instruments. This edition retains all the features of its previous editions viz. plenty of worked-out examples, review questions culled from examination papers of various universities for practice and the solutions to numerical problems and other additional information in appendices. NEW TO THIS EDITION Besides the inclusion of a new chapter on Hazardous Areas and Instrumentation(Chapter 15), various new sections have been added and existing sections modified in the following chapters: Chapter 3 Linearisation and Spline interpolation Chapter 5 Classifications of transducers, Hall effect, Piezoresistivity, Surface acoustic waves, Optical effects (This chapter has been thoroughly modified) Chapter 6 Proximitys sensors Chapter 8 Hall effect and Saw transducers Chapter 9 Proving ring, Prony brake, Industrial weighing systems, Tachometers Chapter 10 ITS-90, SAW thermometer Chapter 12 Glass gauge, Level switches, Zero suppression and Zero elevation, Level switches Chapter 13 The section on ISFET has been modified substantially

Author : Karuppasamy, Karthik Selva Kumar
Publisher : IGI Global
ISBN 13 : 1799816915
Total Pages : 269 pages
Book Rating : 4.11/5 ( download)

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Download or read book Applications and Techniques for Experimental Stress Analysis written by Karuppasamy, Karthik Selva Kumar and published by IGI Global. This book was released on 2019-12-27 with total page 269 pages. Available in PDF, EPUB and Kindle. Book excerpt: The design of mechanical components for various engineering applications requires the understanding of stress distribution in the materials. The need of determining the nature of stress distribution on the components can be achieved with experimental techniques. Applications and Techniques for Experimental Stress Analysis is a timely research publication that examines how experimental stress analysis supports the development and validation of analytical and numerical models, the progress of phenomenological concepts, the measurement and control of system parameters under working conditions, and identification of sources of failure or malfunction. Highlighting a range of topics such as deformation, strain measurement, and element analysis, this book is essential for mechanical engineers, civil engineers, designers, aerospace engineers, researchers, industry professionals, academicians, and students.