Semiconductor Fabrication

Author : Gary S. May
Publisher : John Wiley & Sons
ISBN 13 : 0471790273
Total Pages : 428 pages
Book Rating : 4.73/5 ( download)

DOWNLOAD NOW!

Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Author : Peter Van Zant
Publisher : McGraw Hill Professional
ISBN 13 : 0071501398
Total Pages : 658 pages
Book Rating : 4.92/5 ( download)

DOWNLOAD NOW!

Download or read book Microchip Fabrication, 5th Ed. written by Peter Van Zant and published by McGraw Hill Professional. This book was released on 2004-06-09 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: The #1 book in the industry for more than 15 years! Utilizing a straightforward, math-free pathology, this is a novice-friendly guide to the semiconductor fabrication process from raw materials through shipping the finished, packaged device. Challenging quizzes and review summaries make this the perfect learning guide for technicians in training. * NEW chapter on nanotechnology * NEW sections on 300mm wafer processing * Processes and devices, and Green processing * Every chapter updated to reflect the latest processing techniques

Author : Lars Mönch
Publisher : Springer Science & Business Media
ISBN 13 : 1461444713
Total Pages : 298 pages
Book Rating : 4.18/5 ( download)

DOWNLOAD NOW!

Download or read book Production Planning and Control for Semiconductor Wafer Fabrication Facilities written by Lars Mönch and published by Springer Science & Business Media. This book was released on 2012-09-12 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

Author : Gary S. May
Publisher : John Wiley & Sons
ISBN 13 : 9780471452386
Total Pages : 0 pages
Book Rating : 4.86/5 ( download)

DOWNLOAD NOW!

Download or read book Fundamentals of Semiconductor Fabrication written by Gary S. May and published by John Wiley & Sons. This book was released on 2004 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition. The book integrates Computer Modeling & Simulation tools throughout. Process simulation is used as a tool for what-if analysis and discussion. Comprehensive coverage of process sequence helps readers connect individual steps into a cohesive whole."--

Author : Peter Van Zant
Publisher :
ISBN 13 :
Total Pages : 322 pages
Book Rating : 4.65/5 ( download)

DOWNLOAD NOW!

Download or read book Microchip Fabrication written by Peter Van Zant and published by . This book was released on 1984 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
ISBN 13 : 0071445595
Total Pages : 915 pages
Book Rating : 4.97/5 ( download)

DOWNLOAD NOW!

Download or read book Semiconductor Manufacturing Handbook written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2005-05-18 with total page 915 pages. Available in PDF, EPUB and Kindle. Book excerpt: WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Author : Stanley Middleman
Publisher : McGraw-Hill Companies
ISBN 13 :
Total Pages : 802 pages
Book Rating : 4.26/5 ( download)

DOWNLOAD NOW!

Download or read book Process Engineering Analysis in Semiconductor Device Fabrication written by Stanley Middleman and published by McGraw-Hill Companies. This book was released on 1993 with total page 802 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written primarily for chemical engineering students, the material included in this new text is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems.

Author : D. Keith Bowen
Publisher : CRC Press
ISBN 13 : 1420005650
Total Pages : 296 pages
Book Rating : 4.53/5 ( download)

DOWNLOAD NOW!

Download or read book X-Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Author : Dinesh C. Gupta
Publisher : ASTM International
ISBN 13 : 0803112734
Total Pages : 472 pages
Book Rating : 4.35/5 ( download)

DOWNLOAD NOW!

Download or read book Semiconductor Fabrication written by Dinesh C. Gupta and published by ASTM International. This book was released on 1989 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Author : Charles Nehme
Publisher : Charles Nehme
ISBN 13 :
Total Pages : 38 pages
Book Rating : 4./5 ( download)

DOWNLOAD NOW!

Download or read book Cleanrooms for Semiconductor Fabrication Plants written by Charles Nehme and published by Charles Nehme. This book was released on with total page 38 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the realm of modern technology, semiconductor fabrication stands as a cornerstone of innovation, enabling the creation of ever-smaller, faster, and more powerful electronic devices. At the heart of this intricate process lies the cleanroom, an ultra-pure environment meticulously controlled to maintain the integrity of microscopic components. This meticulously constructed chamber is a testament to human ingenuity, a sanctuary where dust particles are measured in microns and the slightest disturbance can disrupt the delicate dance of fabrication. This comprehensive guide delves into the fascinating world of cleanrooms, exploring their intricate design, construction, and operation. From the fundamentals of air filtration and laminar flow to the intricacies of personnel access and environmental control, this book unveils the intricate mechanisms that safeguard the purity of these controlled environments. As you embark on this journey into the world of cleanrooms, let us imagine a towering cleanroom facility, its gleaming walls reflecting the precision of its purpose. Within this sterile expanse, delicate semiconductor wafers glide along intricate robotic arms, each movement meticulously choreographed to minimize the risk of contamination. The air is eerily still, devoid of any airborne particles, ensuring that these microscopic masterpieces remain pristine. This book is not merely a collection of technical specifications and procedural guidelines; it is an invitation to appreciate the delicate balance that underpins semiconductor fabrication. We will delve into the impact of contaminants on device performance, exploring the microscopic world that threatens to disrupt the purity of these intricate structures. Along the way, we will encounter real-world examples of cleanroom implementation, showcasing innovative designs and emerging technologies that are pushing the boundaries of cleanliness. We will witness the integration of advanced filtration systems, the application of ultraviolet light for contaminant reduction, and the development of sophisticated monitoring and control systems. As we conclude our exploration, let us reflect on the enduring significance of cleanrooms in semiconductor fabrication. These meticulously controlled environments are the silent guardians of technological progress, ensuring the integrity of the devices that shape our modern world.