Principles Of Microelectromechanical Systems

Author : Ki Bang Lee
Publisher : John Wiley & Sons
ISBN 13 : 111810224X
Total Pages : 552 pages
Book Rating : 4.44/5 ( download)

DOWNLOAD NOW!

Download or read book Principles of Microelectromechanical Systems written by Ki Bang Lee and published by John Wiley & Sons. This book was released on 2011-03-21 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: Statics/force and moment acting on mechanical structures in static equilibrium Static behaviors of structures consisting of mechanical elements Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations Fluid flow in MEMS and the evaluation of damping force acting on the moving structures Basic equations of electromagnetics that govern the electrical behavior of MEMS Combining the MEMS building blocks to form actuators and sensors for a specific purpose All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.

Author : Minhang Bao
Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.24/5 ( download)

DOWNLOAD NOW!

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

Author :
Publisher :
ISBN 13 :
Total Pages : 667 pages
Book Rating : 4.84/5 ( download)

DOWNLOAD NOW!

Download or read book Principles of Microelectromechanical Systems written by and published by . This book was released on 2011 with total page 667 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Author : Eun Sok Kim
Publisher : McGraw Hill Professional
ISBN 13 : 1264257597
Total Pages : 415 pages
Book Rating : 4.91/5 ( download)

DOWNLOAD NOW!

Download or read book Fundamentals of Microelectromechanical Systems (MEMS) written by Eun Sok Kim and published by McGraw Hill Professional. This book was released on 2021-05-14 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes: Basic microfabrication Micromachining Transduction principles RF and optical MEMS Mechanics and inertial sensors Thin film properties and SAW/BAW sensors Pressure sensors and microphones Piezoelectric films Material properties expressed as tensor Microfluidic systems and BioMEMS Power MEMS Electronic noises, interface circuits, and oscillators

Author : Nicolae Lobontiu
Publisher : Springer Science & Business Media
ISBN 13 : 0387230378
Total Pages : 415 pages
Book Rating : 4.75/5 ( download)

DOWNLOAD NOW!

Download or read book Mechanics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

Author : Volker Kempe
Publisher : Cambridge University Press
ISBN 13 : 1139494821
Total Pages : 497 pages
Book Rating : 4.23/5 ( download)

DOWNLOAD NOW!

Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

Author : Gabriel M. Rebeiz
Publisher : John Wiley & Sons
ISBN 13 : 0471462888
Total Pages : 512 pages
Book Rating : 4.80/5 ( download)

DOWNLOAD NOW!

Download or read book RF MEMS written by Gabriel M. Rebeiz and published by John Wiley & Sons. This book was released on 2004-02-06 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

Author : Shekhar Bhansali
Publisher : Elsevier
ISBN 13 : 0857096273
Total Pages : 511 pages
Book Rating : 4.72/5 ( download)

DOWNLOAD NOW!

Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Author : Oliver Brand
Publisher : John Wiley & Sons
ISBN 13 : 352767635X
Total Pages : 512 pages
Book Rating : 4.54/5 ( download)

DOWNLOAD NOW!

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Author : Luis Castañer
Publisher : John Wiley & Sons
ISBN 13 : 1119055423
Total Pages : 330 pages
Book Rating : 4.26/5 ( download)

DOWNLOAD NOW!

Download or read book Understanding MEMS written by Luis Castañer and published by John Wiley & Sons. This book was released on 2015-12-14 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds. Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field. Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems. Key features: Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale. Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices. Self-contained study aid featuring problems and solutions. Book companion website hosts Matlab and PSpice codes and viewgraphs.