Author : A.G. Balogh
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3035705208
Total Pages : 512 pages
Book Rating : 4.01/5 ( download)
Book Synopsis Materials Science Applications of Ion Beam Techniques by : A.G. Balogh
Download or read book Materials Science Applications of Ion Beam Techniques written by A.G. Balogh and published by Trans Tech Publications Ltd. This book was released on 1997-05-29 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first particle accelerators were built in the early 1930s. For a long time, these devices were used exclusively by nuclear physicists. In the 1960s, extensive developments in measuring techniques occurred, mainly as a result of newly developed semiconductor devices. Further strong interest arose from the semiconductor industry, and ion implantation became widely accepted as being the ultimate tool for Si-based device fabrication.