Diagnostic Techniques For Semiconductor Materials Processing Volume 406

Author : Stella W. Pang
Publisher :
ISBN 13 :
Total Pages : 616 pages
Book Rating : 4.02/5 ( download)

DOWNLOAD NOW!

Download or read book Diagnostic Techniques for Semiconductor Materials Processing: Volume 406 written by Stella W. Pang and published by . This book was released on 1996-03-18 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.

Author :
Publisher :
ISBN 13 :
Total Pages : 618 pages
Book Rating : 4.91/5 ( download)

DOWNLOAD NOW!

Download or read book Diagnostic Techniques for Semiconductor Materials Processing written by and published by . This book was released on 1996 with total page 618 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Author : Dieter K. Schroder
Publisher : The Electrochemical Society
ISBN 13 : 1566775698
Total Pages : 406 pages
Book Rating : 4.94/5 ( download)

DOWNLOAD NOW!

Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7 written by Dieter K. Schroder and published by The Electrochemical Society. This book was released on 2007 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.

Author : O. J. Glembocki
Publisher :
ISBN 13 :
Total Pages : 536 pages
Book Rating : 4.05/5 ( download)

DOWNLOAD NOW!

Download or read book Diagnostic Techniques for Semiconductor Materials Processing: Volume 324 written by O. J. Glembocki and published by . This book was released on 1994-07 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Author : D. B. Poker
Publisher :
ISBN 13 :
Total Pages : 940 pages
Book Rating : 4.61/5 ( download)

DOWNLOAD NOW!

Download or read book Ion-Solid Interactions for Materials Modification and Processing: Volume 396 written by D. B. Poker and published by . This book was released on 1996-05-23 with total page 940 pages. Available in PDF, EPUB and Kindle. Book excerpt: Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.

Author : Materials Research Society. Meeting
Publisher :
ISBN 13 :
Total Pages : 696 pages
Book Rating : 4.30/5 ( download)

DOWNLOAD NOW!

Download or read book Microwave Processing of Materials V: Volume 430 written by Materials Research Society. Meeting and published by . This book was released on 1996-10-28 with total page 696 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on an international gathering of scientists and engineers from 17 countries, this book, the fifth in a continuing series, assesses microwave processing of materials as an emerging technology. Significant advances in understanding and control of microwave energy and its use in the processing and testing of materials are outlined. Future research and development needs are also explored. Topics include: scale-up and commercialization; microwave nondestructive testing; microwave processing; microwave system design; dielectric properties measurements and analysis; modelling of microwave heating; microwave interactions and mechanisms; microwave processing using variable frequency sources; alternate microwave sources; remediation of hazardous waste; temperature modelling and measurements; microwave processing of polymers; and plasma processing.

Author : Rajiv K. Singh
Publisher :
ISBN 13 :
Total Pages : 704 pages
Book Rating : 4.88/5 ( download)

DOWNLOAD NOW!

Download or read book Advanced Laser Processing of Materials: Volume 397 written by Rajiv K. Singh and published by . This book was released on 1996-09-09 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing has been used in a wide variety of applications and materials such as semiconductors, superconductors, ceramics, polymers and metals. Lasers provide a controlled source of atomic and electronic excitations involving nonequilibrium phenomena that lend themselves to processing of novel materials and structures. The range of laser-solid interactions involving electronic excitation, melting and evaporation result in the formation of novel phases, selective gas excitations, surface modification and low-temperature thin-film deposition. This book from MRS focuses on the use of lasers in both the fundamental understanding and applied aspects of laser-solid and laser-gas interactions relevant to materials processing. Applications featured include thin-film transistors formed by laser-induced crystallization of amorphous silicon, diamond coatings and micromachining. Topics include: fundamentals of laser-solid interactions; fundamentals of pulsed laser ablation; pulsed laser deposition; novel applications of laser processing; laser-driven formation of nanocrystals; laser annealing; surface modification and etching; and laser-assisted chemical vapor deposition.

Author : R. J. Shul
Publisher :
ISBN 13 :
Total Pages : 480 pages
Book Rating : 4.70/5 ( download)

DOWNLOAD NOW!

Download or read book Compound Semiconductor Electronics and Photonics: Volume 421 written by R. J. Shul and published by . This book was released on 1996-10-14 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: III-V semiconductors have continued to find new applications in optical data transmission, full-color displays, automotive electronics and personal communication systems. Complex epitaxial growth, processing, device design and circuit architecture are all necessary for realization of these elements. This book brings together the diverse group of scientists and researchers that are required to develop the next-generation devices. The wide bandgap nitrides, GaN, AlN, InN and their alloys are featured. The commercial availability of blue- and green-light-emitting diodes based on the InGaN/AlGaN system, and the recent announcement of pulsed operation of a laser diode, have stimulated interest in the growth, characterization and processing of these materials. Potential applications in high-temperature/high-power electronics appear promising because of the good transport properties of these nitrides. Topics include: growth and characterization; photonics and processing; electronics and processing; wide bandgap semiconductors and novel devices and processing.

Author : S. Coffa
Publisher :
ISBN 13 :
Total Pages : 392 pages
Book Rating : 4.12/5 ( download)

DOWNLOAD NOW!

Download or read book Rare-Earth Doped Semiconductors II: Volume 422 written by S. Coffa and published by . This book was released on 1996 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rare-earth doped semiconductors hold great potential for a variety of optoelectronic applications, including lasers, LEDs and optical amplifiers. In fact, the field has grown rapidly over the past several years, with a clear switch in direction. The first book by this name was devoted to rare-earth doped II-VI and III-V semiconductors; more than half of the papers in this new volume are devoted to rare-earth doped silicon. This indicates that rare-earth doping of silicon is now seriously considered as a means to achieve silicon-based optoelectronic devices. In addition, new reports on rare-earth doped III-nitrides are also presented. Researchers from 14 countries come together in the volume to discuss current trends, highlight new developments and identify potential electronic and optoelectronic applications. Topics include: incorporation methods and properties; structural, electrical and optical properties; excitation mechanisms and electroluminescence and integration.

Author :
Publisher :
ISBN 13 :
Total Pages : 408 pages
Book Rating : 4.56/5 ( download)

DOWNLOAD NOW!

Download or read book Applications of Synchrotron Radiation Techniques to Materials Science written by and published by . This book was released on 1998 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: